Ceramic microsystems

Ceramic microsystems are mostly used where chemical, mechanical, and high-temperature stability are needed. Within monolithic ceramic LTCC (Low-Temperature Co-fired Ceramic) construction is the three-dimensional structure of different fluidic elements (channel, cavity, valve, mixer, diffusor, distributor, collector, flow limiter, etc.), different sensors (pressure, temperature), actuators, heaters, electrical interconnections, etc.

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