Low-Temperature Co-fired Ceramic (LTCC) technology (i.e. a combination of ceramic and thick-film technology) is suitable for the fabrication of different type of sensors mainly used in specific applications (e.g. harsh environment) and in applications where the integration with other elements (fluidics, electronics, other sensors, etc.) is needed. The use of LTCC technology increases the pressure sensitivity and enables both miniaturization and integration, which makes these sensors very competitive. LTCC pressure sensors can be designed as relative, absolute or differential sensor for different pressure ranges from relatively low (5 mbar) to relatively high (50 bar) pressures.
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