Keramični mikrosistemi se večinoma uporabljajo tam, kjer so kemijska, termična in mehanska stabilnost pomembni dejavniki. Za izdelavo tridimenzionalnih keramičnih struktur z omenjenimi zahtevami je primerna keramika z nizko temperaturo žganja (ang. Low Temperature Co-fered Ceramics – LTCC) v kombinaciji z debeloplastno tehnologijo. Zahtevnejši mikrosistemi so sestavljeni iz različnih fluidnih elementov (kanali, votline, ventili, mešalniki, difuzorji, razdelilniki, kolektori, omejevalniki pretoka itd.), senzorjev (tlak, temperatura, pretok) aktuatorjev, grelcev in krmilne elektronike.
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