Keramični senzorji tlaka

Keramika z nizko temperaturo žganja (ang. Low Temperature Co-fered Ceramics – LTCC) v kombinaciji z debeloplastno tehnologijo je primerna tudi za izdelavo različnih senzorjev. Odlikujejo se po stabilnosti karakteristik, uporabi v zahtevnejših pogojih (višje temperature, agresivni mediji, …) in imajo izrazito prednost pri integraciji v t. i. multi senzorje ali v kompleksne keramične mikrosisteme. Hitra izdelava prototipov omogoča razvoj po željah uporabnika vseh vrst senzorjev za absolutni, diferencialni ali referenčni tlak. Najprimernejša tlačna območja so med 0÷50 mbar in 0÷50 bar.

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